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What is MNF?
MNF, the Micro-Nano characterization & fabrication Facility of Fondazione Bruno Kessler, groups laboratories and competences of the Centre for Materials and Microsystems in two main areas:
- materials characterization
The Microfabrication activities are themselves organized in three distinct areas:
The Microfabrication Area runs two separate cleanrooms, the Detector Cleanroom dedicated to the development of radiation sensors and the MEMS cleanroom where micro devices and sensors for different applications are developed. The Detectors cleanroom is a complete CMOS like pilot line with lithographic capabilities down to a few hundred nanometers with a rather strict list of materials to be processed to avoid cross contamination. The MEMS cleanroom a much more flexible laboratory devoted to development of devices where the integration of different materials with silicon is needed.
In the Testing Area instruments are grouped for the automatic and manual parametric/functional testing (mainly electrical, opto-electronic) of the devices (the actual devices or test devices specifically fabricated on the same substrates and with the same processes).
The packaging area runs a cleanroom with tools for bonding the devices with supply, signal amplification or readout electronics, and for the enclosure of the devices in specific housings (with specific windows, electrical feedthrough, atmosphere, cooling).
The Materials Characterization Area runs different laboratories for the physical/chemical analysis of materials, surfaces and interfaces. The techniques available include Secondary Ion Mass spectrometry (SIMS), Proton Transfer Mass Spectrometry (PTRMS), X-Ray Fluorescence (XRF), X-ray Diffraction (XRD), X-Ray Photoelectron spectroscopy (XPS), Scanning Electron Microscopy (SEM) with Energy Dispersive Spectroscopy (EDS) and Electron Back Scatter Diffraction (EBSD), Scanning Probe Microscopy (SPM) with Atomic Force Microscopy (AFM), Scanning Spreading Resistance Microscopy (SSRM), Kelvin Probe Force Microscopy (FPFM), Scanning Capacitance Microscopy (SCM).