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MEMS class 100-1000 cleanroom (180m2)

  • Diffusion: Expertech CTR200
  • Projection lithography: CD 1.5um, accuracy 1um
  • PVD metallization: Ulvac EBX-16C with e-gun Ferrotec EV S-6
  • Electroplating: Rena
  • Dry etching: TEGAL 900
  • Wet etching