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Scanning Electron Microscopy (SEM)


SEM can produce very high-resolution images of a sample surface, revealing details about less than 1 to 5 nm in size. Classic electron microscopy analysis joint to EDX spectroscopy. It is possible to operate at low acceleration voltage and low vacuum maintaining an high spatial resolution. Suitable to analyze organic and biologic samples The SEM instrument at FBK, model JSM-7401F, is produced by Jeol and is equipped with a Bruker EDX detector to perform composition analyses.

Jeol JSM-7401F
SEM (installed Feb 2005) equipped with cold field emission source, with Secondary Electron detectors (SE) and Backscattered Electron Detectors (BSE) both “in lens” and “in chamber”, offers a nominal resolution of 0,8nm at 30kV and 1,5 nm at 1kV. A special sample bias reduces the effective beam energy and enhances the resolution at low kV (0.1 kV), thus improving performances while charging effects are minimized. An EDS system (Oxford INCA 350) with ultra-thin window is also available for elemental detection starting from Boron. This instrument offers a state-of-the-art capability for microstructural surface characterization using an electronic beam.

Instrument at FBK

Jeol JMS 7401F (installed 2005)

Accelerating voltage

0.7-30 kV

Spatial resolution

1 nm (15 kV)
1.5 nm (1 kV)
0.8 nm (30 kV)


x25 to 1.000.000

Sample max dimensions

X= 70 mm Y= 50 mm

Chemical information

Energy Dispersive X-ray

Elements detectable

From Be

Detection limit