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Surface Engineering by ion implantation (SurfEng)

The experience on ion-matter interaction gained by hte development of SIMS methodologies pointed our attention to the possibilities of nanopatterning surfaces by ion bombardment. In particular it we study ripple formation and voids formation in a near surface layer.

Related tools:

d-SIMS (Dynamic Secondary Ion Mass Spectrometer)

Application cases: 



Controlled surface engineering by ion bombardment